Nano Linear NT...H is a direct drive moving magnet type positioning table, which has magnets and an optical linear scale incorporated in a moving table made of steel, and stator coils and linear scale head incorporated in a steel bed. Combination of adopted Anti-Creep Cage Crossed Roller Way as a linear motion rolling guide, high resolution linear scale, and the strongest neodymium magnet realizes a high precision positioning accuracy and high speed and quick response operation in compact sectional dimension. Furthermore, mechanical contact is completely eliminated except linear motion rolling guides by adopting a unique design of a wireless moving table in which the linear scale sensor is arranged on the bed. So this table generates very little dust and provides a high level of cleanliness. Nano Linear NT...H is most suitable for use as a compact positioning mechanism for semiconductor and liquid crystal related equipment, measuring instruments and assembling systems, where cleanliness is essential. |
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