TX is a Super Positioning Table which realizes super high running accuracy and high load capacity by incorporated Linear Roller Way Super X as its guidance component. Epoch-making 5-micron meter of positioning accuracy and 0.016 μm resolution are possible by full-closed-loop control system.
- High reliability and stability
- High rigidity and high load capacity are realized by incorporating Linear Roller Way Super X on rigid body of cast iron. Deflection level against load and mass can be minimal and high stability operation is promised even under fluctuating load.
- For clean room application
- Low dust generating clean grease is available as an option. Please consult.
- Simple construction
- System configuration can be very simple since this positioning table does not require air-supplying equipment which is necessary for air slide, and helps saving space and cost.